Sensirion Targets Flow Sensor at High-End Semiconductor Applications

Sensirion has introduced the SLQ-QT105 flow sensor for use in high-purity fluid-handling applications in the semiconductor, photovoltaic and flat-panel display industries. The compact and lightweight SLQ-QT105 flow sensor is said to be suitable for flow rates below 2cc/sec (120ml/min) with hydrocarbon-based liquids such as solvents and photoresists.

Flow is measured without moving parts and non-invasively through the wall of a straight flow path, the company said. For long distance and bus capability, a smart digital interface and RS485 communications are offered.

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