N-664 High-Resolution Translation Stage
Piezo motor-based direct drive
NEXACT® piezo stepping motor with subnanometer resolution. High load capacity and precision due to crossed roller bearings. Reference switch. Low operating voltage. Self-locking at rest, no heat generation
Direct measuring principle
High-precision linear encoder PIOne with subnanometer resolution
Application fields
Research and industry. Option: vacuum version
NEXACT® piezo stepping motor with subnanometer resolution. High load capacity and precision due to crossed roller bearings. Reference switch. Low operating voltage. Self-locking at rest, no heat generation
Direct measuring principle
High-precision linear encoder PIOne with subnanometer resolution
Application fields
Research and industry. Option: vacuum version
- Travel range 30 mm
- Encoder resolution 0.5 nm
- Minimal incremental motion 2 nm
- Excellent guiding accuracy
- Max. velocity 10 mm/s
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