N-664 High-Resolution Translation Stage

Piezo motor-based direct drive
NEXACT® piezo stepping motor with subnanometer resolution. High load capacity and precision due to crossed roller bearings. Reference switch. Low operating voltage. Self-locking at rest, no heat generation

Direct measuring principle
High-precision linear encoder PIOne with subnanometer resolution

Application fields
Research and industry. Option: vacuum version
  • Travel range 30 mm
  • Encoder resolution 0.5 nm
  • Minimal incremental motion 2 nm
  • Excellent guiding accuracy
  • Max. velocity 10 mm/s

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