- Velocity to 500 mm/s
- 15 g Acceleration
- 0.1 µm Resolution
- Size only 25x20x8 mm
- 20 mm Travel
The M-661.4P0 is the smallest linear piezo motor driven stage available. It is driven by a newly developed ultra-small linear piezo motor drive. The drive design enables high speed motion and high-resolution positioning with high thrust and holding forces.
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