Air Bearing Stages Target Single-Axis Applications

Newport has introduced the Singulys range of single-axis air bearing stages for single-axis, split XY and gantry applications. Newport will present the high-precision stage range at Semicon West on 13-15 July 2010 at San Francisco's Moscone Center. The Singulys S-370 stage is manufactured from silicon carbide (SiC) ceramic components, similar to Newport's Dynamyx and Hybryx stage products. The body's extremely rigid and compact footprint with three-point mounting allows this stage to be used in tight spaces typically reserved for mechanical bearing designs, without the need for large, lapped mounting surfaces to maintain precise trajectory.

The lightweight carriage features integrated pressure-vacuum air bearings, which are guided by a precisely lapped SiC body. Newport's high-precision stage is suitable for tasks with very high duty cycles that require low angular deviation, tight velocity regulation and high cleanliness. The Singulys B-1200 air bearing bridge features a proprietary ceramic beam that is three times lighter than steel and offers triple the stiffness of granite. When used to replace a steel- or granite-based design in an existing or next-generation tool, the properties of the B-1200 can improve acceleration and decrease settling times, which increases throughput and accuracy with minimal system redesign.

The lightweight and rigid pressure-vacuum air bearing carriage accommodates high (10kg) cantilevered payloads with 2.5G acceleration and, unlike stages using mechanical bearings, minimises contamination to the substrate below. Applications for Newport's B-1200 include Gen 8-11 flat-panel-display inspection, thin-film photovoltaic scribing and wafer processing. Designed for frictionless operation, the S and B Singulys series of air bearing products are sturdy, reliable and require no maintenance and/or lubrication.

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