Nanopositioning Stages For Test And Research

Aerotech has inroduced two rotary and two vertical translation nanopositioning stages for high-throughput production and demanding test and research applications. The stages are said to complement the nanometre-level precision and high-dynamic performance offered by the nMT range. The ANT95-R and ANT130-R rotary stages comprise 95 and 130mm diameter models with a positioning resolution of 0.1 arc sec and with a calibrated repeatability of 2arc/sec. They both utilise Aerotech's direct-drive motor technology for smooth motion with in-position stability to within 0.5arc/sec.

Both sizes are available in angular travel ranges of 20, 180 or continuous 360deg rotation and maximum speed and acceleration for the latter is up to 200rpm/400rad/sec2. Direct axial load capacity is 2kg for the smaller diameter stage and 3kg for the larger stage. The error motion performance across both sizes of rotary stage (tilt, axial and radial) is in line with the overall specifications and suited to demanding high-throughput manufacturing applications such as disk-drive fabrication, fibre-optic device alignment and MEMS sensor manufacture and test.

The nMT range has been further enhanced with the ANT95-L-Z and ANT130-L-Z series vertical stages, which have nominal widths of 95 and 135mm, respectively, and a calibrated positioning resolution of 2nm. Supplied complete with vertical mounting angle brackets and integral pneumatic counterbalance mechanisms, the ANT95-L-Z is available in vertical travel ranges of 25 and 50mm, while the wider ANT-130-L-Z offers 35 and 60mm travel. Within each travel range, a high-performance Plus option is available that increases the repeatability by a factor of around 30 per cent; for the ANT95-L-Z-PLUS this yields a bidirectional repeatability of +/-75nm.

The design of these vertical translation stages is derived from the single-axis and X-Y linear ANT stages with anti-creep cross roller bearings and a centre-driven brushless/non-cogging linear servomotor for ultra-smooth performance characteristics and in-position stability of a few nanometres when driven by Aerotech's ultra-low-noise linear-stage amplifiers. Aerotech's 40MHz linear-encoder processing ensures high resolution and, together, these features ensure a dynamic performance and precision that is said to be better than traditional leadscrew-driven stages or ceramic motor types.

The overall speed and acceleration performance of the vertical stages is up to 200mm/sec and 1g, making them suited to high-throughput production and test applications. All ANT series stages are protected with a durable black hardcoat finish and long working life, and low maintenance is guaranteed by the non-contacting direct-drive linear and rotary motor technology, and non contacting optical encoders used in the design. The high-performance specifications for the ANT range are, in part, attributed to the advanced motion control and drive technologies available as a part of complete motion-system solutions from Aerotech.

With all cabling included and fully assembled stages that are thoroughly tested and calibrated in Aerotech's clean-room facilities, complete systems can encompass custom-designed machine frames with highly stable granite base and gantries to support customer-supplied equipment such as lasers or metrology apparatus. Aerotech's advanced motion controls include algorithms, data-acquisition and analysis tools that counteract the minute disturbances that influence positioning stability and dynamic performance at sub-micron levels, and optimise overall performance.

Motion-control options include the software-only A3200 Automation Platform with DSP-based Npaq drives or the Ensemble series rack, or desktop system for multi-axis positioning systems, while the Soloist series is suited to demanding single-axis applications. Servo-drive technologies include PWM amplifier stages for highest dynamic performance, in addition to wide bandwidth and ultra-low-noise linear servo amplifiers for best in-position stability/lowest jitter performance.

Aerotech motion controllers also feature advanced software commands that are designed to simplify interfacing with customers' own systems, such as the PSO command, which synchronises laser firing with real-time position. Comprehensive analogue and digital I/O and GUIs are also available, along with a choice of diagnostic, setup and programming tools for fast, trouble-free system commissioning. Supported programming languages include Aerobasic, Visual Basic C and C++, with optional advanced application support covering Windows-based ActiveX components and .NET class libraries.

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